A pulsed electric-arc carbon plasma generator is designed to produce a relatively dense plasma flow, consisting mainly of carbon ions. The plasma flow is formed as a result of erosion of the generator cathode accompanying the process of a pulsed electric arc discharge in a vacuum.

The principle of operation and structure of the PARC 29/3 generator is similar to the principle of operation and structure of the PARC 29 generator. PARC 29/3 is three PARC 29 generators combined in one unit to expand the deposition area of a thin film coating. The generators have a common supply circuit for the anode and the additional anode. The supply circuits of the cathodes and ignition electrodes are separated.

Технические характеристики

Cathode diameter	29 mm
Number of the cathodes	3
Cathode resource before servicing or replacing (for each cathode)	100,000 pulses
The pulse repetition rate of the main discharge at the energy released during one pulse of 120 J	≥ 45 Hz (3×15 Hz)
Height of the coverage area at a distance of 150 mm from the outer edge of the anode	300 mm
The number of pulses required to obtain a thin-film coating with a thickness of 1 micron with a simple rotation of the tooling	≤ 180,000 (3×60,000)
Connecting dimensions	flange 370×170 / 320×120 mm