Pulsed generator of carbon plasma PARC 49

A pulsed electric-arc carbon plasma generator is designed to produce a relatively dense plasma flow, consisting mainly of carbon ions. The plasma flow is formed as a result of erosion of the generator cathode accompanying the process of a pulsed electric arc discharge in a vacuum.
The principle of operation and structure of the
Specifications
Cathode diameter | 49 mm |
Cathode resource before servicing or replacing | 150,000 pulses |
The pulse repetition rate of the main discharge at the energy released during one pulse of 120 J | ≥ 25 Hz |
Height of the coverage area at a distance of 150 mm from the outer edge of the anode | 150 mm |
The number of pulses required to obtain a thin-film coating with a thickness of 1 micron with a simple rotation of the tooling | ≤ 60,000 |
Connecting dimensions | flange ISO-F 250 |